DuPont™ AmberTec™ MR-450 UPW H/OH Ion Exchange Resin

Non-Separable, Uniform Particle Size, Mixed Bed Ion Exchange Resin for Final Polishing for the Semiconductor Industry

Description

DuPont™ AmberTec™ MR-450 UPW H/OH Ion Exchange Resin is an ultrapure water-grade, non-separable, homogeneous, mixed bed resin recommended as a point-of-use or non-regenerable mixed bed in the polishing loop to achieve sub-ppb levels of soluble silica, boron, sodium, potassium, sulfate, chloride, zinc, iron, and aluminum. This non-regenerable mixed bed resin is used for 2–3 years before replacement.

This homogeneous mixed bed contains 360-µm cation resin and 590-µm anion resin (mean particle size), thus providing efficient kinetics to achieve a higher operating capacity. The ratio of anion to cation in AmberTec™ MR-450 UPW H/OH is volumetrically optimized to achieve maximum removal of boron and silica. 

Semiconductor-grade is characterized by the high conversion to ionic sites (≥ 95.0%). As shown in Figure 2, the excellent rinse characteristics also allow very efficient online operation.

Applications

Non-regenerable, polishing mixed bed

Historical Reference

AmberTec™ MR-450 UPW H/OH Ion Exchange Resin has previously been sold as DOWEX MONOSPHERE™ MR-450 UPW Ion Exchange Resin.

Typical Properties

IER-AmberTec-MR-450-UPW-H-OH-PDS-45-D00880-en.pdf